Abstract
This paper introduces the context of the application of sputtering coating coldworking process and its temperature control technology, discusses the important role of temperature control in the physical and chemical properties of coating, and generally introduces the advantages and application of various temperature control technologies in the sputtering coating coldworking process.
1 Introduction
Sputtering is a physical and chemical process for obtaining materials through sputtering in vacuum space, which is widely used in the production of single crystal, ultra-thin film and other materials and components [1]. Sputtering coating is a process of sputtering and coating technique, and its application and superiority are very obvious in electronic technology now [2]. Sputtering coating coldworking process is an important branch of the sputtering deposition process. The main components of this process include sputtering deposition while adding appropriate temperature control. The temperature control of the sputtering coating coldworking process is the basic guarantee to ensure the quality of the coating [3]. This paper will introduce the temperature control of the sputtering coating coldworking process and its application and superiority.
2 Temperature control of sputtering coating coldworking process
Temperature is important for material and test parameters control in the sputtering coating coldworking process, which has an effect on the growth of molecular crystal, material properties, sputtering deposition rate and other physical and chemical properties of equipment. Generally, sputtering of materials needs to maintain a certain temperature, while adding cooling and heating sources, to control the temperature, improve the deposition rate and ensure the coating quality [4].
2.1 Temperature control using heating sources
Adding heat sources is the most commonly used temperature control methods in the sputtering coating coldworking process. This method is mainly to heat the materials or the target and substrate by the heating equipment of the device, to shorten the time of sputtering deposition, to improve the deposition rate and the deposition synchronous rate, and to reduce the temperature attenuation of materials during coating process [5]. This method is suitable for metal target materials with good heat resistance, and is also suitable for materials that can be directly heated.
2.2 Temperature control using cooling sources
Adding cooling sources is also a commonly used temperature control method. This method can maintain a low temperature for sputter deposition and reduce the deposition rate of materials. It is suitable for some easily oxidized and easily volatile materials, and can also reduce the temperature deviation of coating layer, improve the uniformity of coating layer, improve the stability of the process and improve the performance of the product [6].
2.3 Temperature control using air
Air temperature control technology is a kind of passive temperature control method, which uses air to control the temperature of the sputtering coating process. The main principle is to set the air temperature to a certain temperature which is suitable for the sputtering deposition process, then enter into the device and heat the material or the target and substrate, so as to ensure the normal operation of the material or equipment [7].
3 Advantages and application prospects
The application of temperature control technology in the sputtering coating coldworking process not only improves the rate of sputtering deposition, but also improves the stability of the equipment and the uniformity of the coating layer. In addition, it also improves the physical and chemical properties of the material and has broad application prospects in the fields of electronics, photovoltaic and aerospace [8].
4 Conclusion
The application of temperature control in the sputtering coating coldworking process is very important. Different temperature control technologies have different advantages, which can be applied in different occasions to improve the rate of coating and the quality of coating, and will have better application prospects in the future.
References
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